TEM-1800 Series Gas Filters

TEM-1800 Series Gas Filters

Number: TEM-1800
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Specifications

Number
TEM-1800
Material
Teflon
Flow Rate
0-300 L/min

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Product description

TEM-1800 Series Gas Filters

TEM-1800 Series filters are specifically semiconductor grade gases when flow rates to 10 SCFM are required. This all-welded assembly will deliver 0.003 micron absolute filtration where a higher flow rate is required.

This all Fluoropolymer filter element enclosed in a 316L stainless steel electro-polished welded housing. Final assebly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 300°F/150°C.

Specifications:
  • Material: All Teflon®
  • Flow Rate: 0-300 L/min

  • 99.9999999% Efficient @0.003 Microns
  • All Fluoropolymer Construction with PTFE Encapsulated Viton O-ring
  • 316L 10RA Electroplished Stainless Steel Housing
  • 250 psig operation pressure at 250°F
  • Helium leak tested to 1 X 10 -9 cc/sec.
  • 100% Integrity Tested
  • Compatible with all Semi-Grade Gasses
  • Available with Gasket Seal, Compression and Butt Weld Fittings