Standard PAD CONDITIONER

Pad-refreshing consumable for removal of polyurethane pad surface clogging
4.25" (Stainless Steel, Diamond-Nickel Bonding)

Our CMP Pad Conditioners have been tested and proven in production by major semiconductor manufactures in USA, Europe, Taiwan and Korea. We have the capability to meet the needs of each customer by providing customized disks. Our CMP disks are available in various production quantities, shapes and sizes for all CMP production platforms.

Application:

• Semiconductor CMP process (ILD, STI, Metal, TSV, Buffing, Barrier, Poly, Gate)

Features

• Stable Pad Roughness
• Long conditioner life time