SPIN300x advanced spin coater in-deck POLOS® PTFE

POLOS 300 Advanced Single Substrate Spin Processor, In-Deck version, automatic chemical dispense, heavy duty motor. This revolutionary spin coater series can be used as a full automatic solution for your process. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. It is suitable for processing fragments as small as 5 mm even for processing fragments as small as 5 mm.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

• Up to 300 mm round or 8” x 8” square substrates Material: PTFE (High grade PTFE, tool body and all wetted surfaces)
• Post-CMP cleaning
• LIGA processes
• TSV processing
• Mask cleaning
• Etch assist SU-8 develop
• Plating pre-cleaning Lift off
• Pre-plating bubble removal
• Resist strip
• Post-laser cleaning
• CW & CCW Puddle Rotation
• (Detachable) Colour Touchscreen with Customisable Icons
• Glove friendly, IP52, chemical resistant
• Unlimited Program Storage for recipes with multiple steps each
• USB Port
• Standard 1" Drain Connection
• Compatible with our sapphire MegPie megasonic transducer
• We also offer optional backside Rinse and Pneumatic Lid

Including:

• 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
• 1 x Vacuum Chuck A-V87-S96-PTFE-HD

For more information visit:
www.sps-polos.com