POLOS
SPIN300x advanced spin coater in-deck POLOS® NPP
POLOS
SPIN300x advanced spin coater in-deck POLOS® NPP
Choose your size:
POLOS 300 Advanced Single Substrate Spin Processor, Desktop version, automatic chemical dispense, heavy duty motor. This revolutionary spin coater series can be used as a full automatic solution for your process. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. It is suitable for processing fragments as small as 5 mm even for processing fragments as small as 5 mm.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes
Specifications:
- Up to 300 mm round or 8” x 8” square substrates
- Material: PTFE (High grade PTFE, tool body and all wetted surfaces)
- Post-CMP cleaning
- LIGA processes
- TSV processing
- Mask cleaning
- Etch assist SU-8 develop
- Plating pre-cleaning Lift off
- Pre-plating bubble removal
- Resist strip
- Post-laser cleaning
- CW & CCW Puddle Rotation
- (Detachable) Colour Touchscreen with Customisable Icons
- Glove friendly, IP52, chemical resistant
- Unlimited Program Storage for recipes with multiple steps each
- USB Port
- Standard 1" Drain Connection
- Compatible with our sapphire MegPie megasonic transducer
- We also offer optional backside Rinse and Pneumatic Lid
Including:
- 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
- 1 x Vacuum Chuck A-V87-S96-NPP-HD
For more information visit:
www.sps-polos.com
Brand
POLOS
Product Number
SPIN300x-Advanced-INT-NPP
Status
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