POLOS
SPIN200x Standard - Spin coater POLOS® - Integrator Model PTFE
POLOS
SPIN200x Standard - Spin coater POLOS® - Integrator Model PTFE
Choose your size:
SPIN200x-INT Single Substrate Spin Processor
Type: In-Deck Version
The POLOS SPIN200x is a versatile and high-quality substrate spin coater, made out of PTFE. It is specifically designed for R&D and low volume production. The In-Deck Version is suitable for easy integration in your existing or new wetbench.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes
Specifications:
- For up to 8" (200 mm) Wafers
- For up to 6" x 6" (150 mm) Substrates
- Material: PTFE
- 12.000 RPM (Depending on Substrate / Chuck)
- High Acceleration and Accuracy
- Manual Chemical Dispense
- Central dispensing syringe holder with integrated N2 diffuser
- CW& CCW Rotation
- Colour Touchscreen with Customisable Icons
- USB Port
- 20 kg
Including
- 1 x A-V87-S96-PP-HD - Vacuum Chuck
For more information visit:
SPS-polos.com
Brand
POLOS
Product Number
S200X-ST-PTFE-cleaning
Material
PTFE
Wafer size
Up to 8" (200 mm)
Substrate size
Up to 6" x 6" (150 mm)
Type
Integrator
Drive unit
Up to 12.000 RPM
Acceleration/Deceleration
1-30.000 RPM
Programs
CW, CCW rotation and puddle option
Status
Request information
Options
Photolithography
37596
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POLOS
Photolithography
SHSK
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POLOS
Photolithography
29243
Options POLOS
POLOS