POLOS 200 Advanced Single Substrate Spin Processor, tabletop version, automatic chemical dispense, heavy duty motor. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. The control of the motor mode rotation, in combination with the up to 6 automatic dispensers in the POLOS Advanced systems, enables a uniform deposition of multilayer thin films and photo resist development. These features enable a quick process optimization with fully automatic recipes and high reproducibility.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes
Specifications:
Up to 260 mm round or 6” x 6” square substrates
Material: Natural Polypropylene (High grade NPP, tool body and all wetted surfaces)
Transparent Lid with syringe holder for central dispensing
CW & CCW Puddle Rotation
(Detachable) Colour Touchscreen with Customisable Icons
Glove friendly, IP52, chemical resistant
Unlimited Program Storage for recipes with multiple steps each
USB Port
Standard 1" Drain Connection
Compatible with our sapphire MegPie megasonic transducer
We also offer optional backside Rinse and Pneumatic Lids, vacuum pumps, dispence vessels and a Jet Spray injector for this series!
1 Piece Vacuum Chuck A-V36-S45-NPP for substrates up to Ø 150mm and 1 piece Fragment Adapter D-V10-S50-NPP
Or
1 Piece Vacuum Chuck A-V87-S96-PTFE for substrates from Ø100 mm up to Ø200 mm (Please specify in your Request for Quote or order. If you are not sure which one is best suitable for your solution, please contact us for advice.)
