POLOS
SPIN150i-PTFE-INT Single Substrate Spin Processor
POLOS
SPIN150i-PTFE-INT Single Substrate Spin Processor
Brand
POLOS
Product Number
42026
Up to 6" (150mm)
PTFE
In-Deck Version
Status
Request information
The POLOS SPIN150i is a versatile and high-quality substrate spin coater, made of PTFE or NPP. It is specifically designed for R&D and low volume production. This In-Deck Version is suitable for easy integration in your existing or new wetbench.
Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes
Specifications:
- Up to 6" (150 mm) Wafers
- Up to 4" x 4" (100 mm) square Substrates
- Material: PTFE
- Easy, step- by- step recipe programming via large colour touchscreen
- Transparent Lid with syringe holder for central dispensing
- Electro-magnetic safety lid lock
- N2 diffuser for N2 purge during process
- 12.000 RPM (Depending on Substrate / Chuck)
- High Acceleration and Accuracy
- Manual Chemical Dispense
- CW & CCW Rotation
- Detachable Colour Touchscreen with Customisable Icons
- Unlimited Program Storage for recipes with multiple steps each
- USB Port
Including
- 1 x A-V36-S45-PTFE-HD Vacuum Chuck
- 1 x D-V10-S50-PTFE-HD Fragment Adapter
For more information visit:
www.sps-polos.com