Ultra high-purity chemical pump for the semiconductor industry.
Model: SEMI H Materials: center housing PTFE-TFM; side housings PTFE conductive Pump sizes: 10, 20 Products: hot applications with acids and caustics
The pumps from our SEMI DMS series have been designed especially for the purpose of semiconductor industry. The whole assembly process of these unique products is completed in a CLASS 100 CLEAN ROOM, involving a double cleaning of the parts, their testing with deionized water, and finally sealing in plastic foils.
FEATURES
No metal parts SEMI T, H and E
No elastomeric O-rings
Lubrication-free air motor
Cleanroom Class 100 assembled, tested with de-ionized water and double packaged
Durable TFM diaphragms, for extended flex life
Four materials for different applications with max. temp. 200°C
Machined from solid material on a very highly advanced CNC Machining and Turning Centre controls and monitoring available for all sizes
Very easy repairing, just 40% spares comparing pulsation dampers, leak detection, electronic/pneumatic
