WHS
SafeGuard Wafer Transfer 100 mm (4”)
WHS
SafeGuard Wafer Transfer 100 mm (4”)
Choose your size:
Precision Robotically Controlled Bulk Wafer Transfer
Thin, Compound, High-Value Wafer Handling
Low-Maintenance, Accurate
Gentle lift of wafers, no abrasion
Class 1 Cleanroom Compatible
Touch Screen Display
Programmable positions and speed
SEM
Brand
WHS
Product Number
WHS-T1-401
Size of
Color
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Stage: Anti-Static PEEK Rods : Carbon Fiber
Size
100 mm (4”)
Type
Automatic System
Status
Request information
Advanced technology automatic SafeGuard bulk wafer transfer for 100 mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized 25-set transfer arm assembly for gentle lifting wafers - protecting the wafer edge from abrasion or shock to increase yields; touchscreen recipe software for standard operation and password protected service menu for motor, axis control, event logging. Thin and bonded wafer compatible. ISO Class 3.