The Stainless Steel MegPie is a single-wafer Megasonic stainless steel transducer for cleaning and sonochemical processing that does not require strong acids or bases. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve your process efficiency and lower the process time. And it is easy to retrofit to your single-substrate processing tool.

Available in 100mm to 450mm+ and custom sizes

Features & benefits

• The 316 stainless steel resonator is compatible with solvents
• Patented crystal bond to the resonator
• Patented RF connection to the crystal
• Redundant internal RTD temperature monitoring
• Uniform direct acoustic energy applied to the process
• Increased process efficiency
• Reduced process time
• Reduced process chemistry usage
• No moving parts to maintain
• No consumables – works better than brushes

Technical specifications

• Power density: 0.05 – 2.0 Watts/cm2
• Standard operating frequency: 925 kHz; other frequencies available on request
• Mounting height: 0.02" – 0.14" (0.5mm – 3.5mm)
• Process fluid temperature: 15°C – 60°C
• Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm
• Operating RPM: 1 – 100
• Nitrogen or CDA purge: 10 lpm
• Mounting with 3 x M6 female threaded bosses
• Use with IMPulse RF electronics

Processes Supported

• Post-CMP cleaning
• TSV processing
• Pre-SOIC bond cleaning
• SU-8 develop
• Lift off
• Resist strip
• LIGA processes
• Mask cleaning
• Etch assist
• Plating pre-cleaning
• Pre-plating bubble removal
• Post-laser cleaning