MegPie Transducer (150mm) - Sapphire

The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time. It is easy to retrofit to your single-substrate processing tool.

Available in 100 mm to 450 mm+ and custom sizes

Features & benefits

• Particle-neutral sapphire resonator – no particles added to the process
• Patented crystal bond to the resonator
• Patented RF connection to the crystal
• Redundant internal RTD temperature monitoring
• Sapphire resonator compatible with all processing chemistries
• Uniform direct acoustic energy applied to the process
• Increased process efficiency
• Reduced process time
• Reduced process chemistry usage
• No moving parts to maintain
• No consumables – works better than brushes

Technical specifications

• Power density: 0.05 – 2.0 Watts/cm2
• Standard operating frequency: 925 kHz; other frequencies available on request
• Mounting height: 0.02" – 0.14" ( 0.5 mm – 3.5 mm)
• Process fluid temperature: 15°C – 60°C
• Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm
• Operating RPM: 1 - 100
• Nitrogen or CDA purge: 10 lpm
• Mounting with 3 x M6 female threaded bosses
• Use with IMPulse RF electronics

Processes supported

• Post-CMP cleaning
• TSV
• Pre-SOIC bond cleaning
• SU-8 develop
• Lift off
• Resist strip
• LIGA processes
• Mask cleaning
• Etch assist
• Plating pre-cleaning
• Pre-plating bubble removal
• Post-laser cleaning