Applications

• General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
• Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
• Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
• Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.

The WHS-V6-300 is an advanced 300 mm tabletop portable battery-powered vacuum wand provides mobility to go anywhere in the cleanroom. The powerful vacuum pump, high performance battery and auto-shutoff holder allows this system to be used in a high production environment for multiple days on one charge. Ships with 300 mm vacuum tip (WHS-V1-AP6NST).  Designed for wafer rescue or light-production, ISO 3, FS209E Class 1.