WHS

Box Cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular

Box Cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular

process-cassettes » Metal Cassettes » Aluminum Box
WHS

Box Cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular

Choose your size:
Aluminum with Wear-Resistant, Smooth Hard-Coating
Heat-Resistant Up to 250°C (Al) / 250°C (PTFE)
Smooth Slot-Entry and -Shape
Vacuum Vented Screws
Design According to SEMI-Standard

Applications:

  • Process Equipment -Thermal processes environments where the wafer is processed in the cassette above 43° C (110° F), the typical structural threshold upper limit of plastic process cassettes.  This includes chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications.
  • High wafer insertion temperatures - Process equipment where wafer insertion temperatures (wafers coming out from the process tool) exceed the melting point of a plastic cassette.  The need for higher throughput reduces the amount of time the wafers are left inside the chamber to cool and acclimate. 
  • Precision carrier requirements - Moderate-thermal automation environments where there is a need for dimensional precision that a plastic cassette cannot offer.
  • Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

The M2 series is an all aluminum 25-slot metal cassette with solid end wall for processing semiconductor wafers in a thermal environment, up to 250°C. A SEMI compliant cassette with straight side walls, stainless steel spacers, PTFE wafer stops, and 8° slot angles. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance. ISO 3, FS209E Class 1.