Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular 76 mm (3”)

Applications:

• Process Equipment -Thermal processes environments where the wafer is processed in the cassette above 43° C (110° F), the typical structural threshold upper limit of plastic process cassettes.  This includes chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications.
• High wafer insertion temperatures - Process equipment where wafer insertion temperatures (wafers coming out from the process tool) exceed the melting point of a plastic cassette.  The need for higher throughput reduces the amount of time the wafers are left inside the chamber to cool and acclimate. 
• Precision carrier requirements - Moderate-thermal automation environments where there is a need for dimensional precision that a plastic cassette cannot offer.
• Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

The WHS-M2 series is a 25-slot, all-aluminum metal cassette designed for processing semiconductor wafers in thermal environments up to 250°C. Based on legacy cassette designs commonly used in semiconductor OEM equipment from the 1980s to 2000s, the WHS-M2 is ideal for modern thermal applications, including chemical vapor deposition (CVD), rapid thermal processing (RTP), and wafer annealing. The cassette features PTFE Teflon stops, which provide a gentler material for wafer edge contact, ensuring safer, more controlled landings when operators manually load wafers into the cassette, reducing the risk of wafer damage.

The WHS-M2 cassette features straight side walls, stainless steel spacers, and an 8° slot angle, ensuring smooth wafer insertion and precise handling. Its all-aluminum surfaces are hard clear (HC) anodized, providing enhanced abrasion resistance for prolonged use in ISO 3 (FS209E Class 1) cleanroom environments. With vacuum-vented screws and wear-resistant coatings, the cassette is optimized for high-temperature, high-throughput applications where plastic cassettes would fail.

Available in 76mm, 100mm, 150mm, and 200mm configurations, the WHS-M2 offers flexibility for a range of wafer sizes. Custom configurations are also available, including electroless nickel plating (EN), 13-slot designs, and custom slot profiles for specialized wafer handling needs. The WHS-M2 is available with or without a solid end wall feature, allowing for versatility based on process requirements.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-M2 provides reliable performance, durability, and precision for semiconductor thermal processing, with short lead times and small minimum order quantities for custom configurations.