WHS

Box Cassette, aluminum (coated), 25 slot, slot-shape angular

Box Cassette, aluminum (coated), 25 slot, slot-shape angular
WHS

Box Cassette, aluminum (coated), 25 slot, slot-shape angular

Choose your size:
Aluminum with wear-resistant, smooth hard-coating and PTFE wafer stops
Heat-resistant up to 350°C (Al) / 250°C (PTFE)
Smooth slot-entry and - shape
Vacuum vented screws
Design according to SEMI-standard

The M2 series is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C. A SEMI compliant cassette with straight side walls, stainless steel spacers, PTFE wafer stops, and 8° slot angles. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.Custom configurations available (may incur minimum order quantity amounts): EN-electroless nickel plating on aluminum types for high-vacuum applications; flat profile slotting for thin or thick wafers; end-wall fixed handles; dual h-bar configurations for backside wafer processing.
Please send your requests to sales@waferhandlingsystems.com