WHS

Automatic single wafer presenter (WHS-P1)

WHS

Automatic single wafer presenter (WHS-P1)

Choose your size:
Scratch reduction tool
Macro wafer inspection station
Wafer flipping / inverting
Antistatic ground path construction
Recipe programmable
Safe edge handling lift blade

Applications

  • Wafer inspection - Wafer presenters are used to hold and rotate wafers during inspection, allowing for automated and consistent macro analysis of wafer surfaces and features.  Commonly seen in raw wafer production, post-epitaxial inspection, glass wafer haze, scratch, macro defect inspection, and lot process integrity inspections in Photolithography (photoresist) and Probe/Test areas (inking). 
  • Scratch reduction - Scratches on wafers can occur during handling and can result in defects and yield loss. Wafer presenters are designed to lift the wafer up from its cassette, allowing operators to access and handle the wafer without having to physically go between the wafers inside the cassette. This eliminates the need for operators to manually manipulate the wafer and reduces the risk of damage or contamination.

The WHS-P1 is an automated single wafer presenter with rotation, designed  available in the models: 76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”) diameter wafers. The WHS-P1 fully lifts a single wafer to an operator for removal from a cassette or for wafer inspection applications. The system can also be used to flip the wafer 180° degrees for backside applications. Constructed with antistatic materials, the WHS-P1 is built to meet the strict ISO 3 (FS209E Class 1) standards, ensuring the highest level of protection for your wafers.

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