WHS

Automatic Slide Transfer 76 mm (3”)

WHS

Automatic Slide Transfer 76 mm (3”)

Choose your size:
Antistatic Construction With Wafer and Cassette Ground Paths
Touch Screen Display Controls
Programmable Transfer arm Resistance Sensor
Integrated Cassette-in-place Sensors

Applications

  • Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
     
  • Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette.
     
  • Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas.
     
  • Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
     
  • Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
     
  • Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
     

Material Stage: Anti-Static/Natural Polypropylene
Material Arm: ESD-Safe Polyoxymethylene
Type: Automatic System
Slots: 25 Slots

Precision automatic horizontal bulk wafer slide transfer for safely transferring 76 mm wafers between two SEMI compliant wafer cassettes. Compatible with high- and low-profile plastic process, metal cassettes and 200mm shipping cassettes. Features a touchscreen display, integrated SEND and RECEIVE stage cassette-in-place sensors and an adjustable transfer arm resistance sensor which monitors for excessive forces during motion. Antistatic and chemical resistant materials. ISO Class 4.

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