WHS
Automatic Slide Transfer 100 mm (4”)
WHS
Automatic Slide Transfer 100 mm (4”)
Choose your size:
Antistatic Construction With Wafer and Cassette Ground Paths
Integrated Safety Sensors for Cassette Placement and Wafer Transfer Arm
Touch Screen Display Controls
Programmed Sensor-Protected Slide Transfer
Class 10 Cleanroom Compatible
Programmable
Brand
WHS
Product Number
WHS-T2-401
Size of
Color
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Stage: Anti-Static/Natural Polypropylene Arm: ESD-Safe Polyoxymethylene
Size
100 mm (4”)
Type
Automatic System
Slots
Wafers For 25-Slot Cassettes
Status
Request information
Precision automatic horizontal bulk wafer slide transfer for safely transferring 100 mm wafers between two SEMI compliant wafer cassettes. Compatible with high- and low-profile plastic process, metal cassettes and most 100mm shipping cassettes with an H-BAR. Features a touchscreen display,integrated SEND and RECEIVE stage cassette-in-place sensors and an adjustable transfer arm resistance sensor which monitors for excessive forces during motion. Antistatic and chemical resistant materials. ISO Class 3.