Automatic Flatfinder Multisize 76,100,125,150 mm

Automatic Flatfinder Multisize 76,100,125,150 mm

Number: WHS-A1-701
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Specifications

Number
WHS-A1-701
Size
Multisize 76,100,125,150 mm
System
Automatic System
Slots
Wafers for 25 Slot Cassettes
Material
Stage: Anti-Static polyoxymethylene - Roller: Anti-Static Polyurethane
Brand

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Product description

Advanced technology automatic wafer flat aligner for alignment of 150mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized stage for gentle lifting of compound wafers - protecting the wafer edge and increasing yields; touchscreen recipe software for standard alignment, thin wafer/compound wafer alignment and edge inspection recipes. ISO Class 3.