Automatic Flatfinder 150 mm (6”)

Automatic Flatfinder 150 mm (6”)

Number: WHS-A1-601
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Specifications

Number
WHS-A1-601
Size
150 mm (6”)
System
Automatic System
Slots
Wafers for 25 Slot Cassettes
Material
Stage: Anti-Static polyoxymethylene - Roller: Anti-Static Polyurethane
Brand

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Product description

Advanced technology automatic wafer flat aligner for alignment of 76 mm to 150 mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized stage for gentle lifting of compound wafers - protecting the wafer edge and increasing yields; touchscreen recipe software for standard alignment, thin wafer/compound wafer alignment and edge inspection recipes. ISO Class 3.