Aluminum Test Wafer, 150 mm (6”), Bare, with SEMI Notch.

WHS-W Aluminum Test Wafer

Applications:

• Training: Aluminum test wafers are used to train new operators on wafer handling techniques, allowing them to practice and develop their skills before handling more expensive and fragile production wafers.
• Automation Teach: Aluminum wafers are often used to teach robotic movements in automation, allowing engineers to test and refine robotic movements using durable aluminum wafers before moving on to more fragile and expensive silicon wafers.
• Protection: Aluminum wafers can be used as protective electrostatic chuck (PEC) wafers to cover fragile wafer chucks inside a process tool chamber when the tool is undergoing a chamber cleaning cycle, preventing damage to the sensitive chucks during the cleaning process.

The WHS-W series is a high-quality, bare aluminum test wafer designed for a wide range of cleanroom applications. Available in 150 mm diameter, these wafers feature either a SEMI-standard notch, making them ideal for operator training, automation setup, target wafer customization, and use as protective electrostatic chuck (PEC) covers during chamber cleaning.

Manufactured from heat-treated aluminum alloy 5754-H22, the WHS-W wafers are engineered to resist deformation and warping under repeated use. With a thickness of 0.8mm and a surface roughness of 1.6μm Ra, these bare aluminum wafers come without any surface finish or anodization. This allows customers to modify or customize the wafers as needed for specialized applications, such as target or carrier wafer development.

The WHS-W wafers are especially valuable for robot and wafer handling training, providing a safe and durable alternative to fragile silicon dummy wafers. They are also ideal for automation teaching, enabling engineers to refine robotic movements and processes. In addition, the wafers can serve as PEC covers, protecting sensitive chucks during tool chamber cleaning.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-W series offers a robust, customizable solution for semiconductor manufacturing environments where durability and flexibility are essential.