Vertical Wafer Transfer - Single/Mass 8" (200mm)

8" (200mm) Vertical Wafer Transfer - Single/Mass

Model: SWTS8

The SWTS-Series is designed for automatic wafer transfer. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and mechanical wafer notch/flat-aligners. The waferhandling is realized via edge gripping, so no vacuum is required. The system is equipped also with a automatic Mass Wafer Gripper to transfer a whole batch.

Specifications:

• For 8" (200mm) Wafers
• Wafer Thickness: 450um - 750um
• Single and Mass Transfer Capabilities
• No Vacuum Needed (Edge Gripping)
• Vertical Transfer System
• Cross Slotted Wafer Detection
• Tabletop System or With Stand
• Throughput up to 700 wph
• Windows Operating System
• ESD-Safe
• RFID Cassette Identification on Request
• Upgrade to Wafer Identification Possible
• Full SECS/GEM Compliance

Applications:

• Wafer Transfer
• Compress to Top by Slot
• Compress to Bottom by Slot
• Invert by Slot
• Individual Transfer-Function to progam custom recipes

*** Note: Please specify cassette model numbers when ordering ***

Contact SPS-Europe for special requests!