TBP
6" (150mm) & 8" (200mm) 4-Cassette Sorter
TBP
6" (150mm) & 8" (200mm) 4-Cassette Sorter
6" (150mm) & 8" (200mm) 4-Cassette Sorter
Model: FCS2015
The FCS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
Specifications:
Optional Features:
*** Note: Please specify cassette model numbers when ordering ***
Model: FCS2015
The FCS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
- 4" (100mm)
- 5" (125mm)
- 6" (150mm)
- 8" (200mm)
Specifications:
- For 6" (150mm) & 8" (200mm) Wafers
- Wafer Thickness: 220µ - 700µ
- 2 Cassette Sorter
- Automatic System
- ESD-Safe
- 25 Slot Cassettes
- Vacuum Required
- Throughput up to 700 wph
- Footprint: 1100 mm x 800 mm
Optional Features:
- RFID Cassette Identification
- Wafer Backside ID Reading
- Vacuum Free Edge Gripping
- Thin Wafer Capability
- Wafer Flipping
- 13/15 Slot Cassette Capability
- Wafer Alignment
- Barcode / OCR Reading
- Full SECS/GEM Compliance
*** Note: Please specify cassette model numbers when ordering ***
Brand
TBP
Product Number
FCS2015
Wafer Size
6" (150mm) - 8" (200mm)
System
Horizontal Handling
Slots
Without OCR
Status
Request information