TBP

2-Cassette Sorter 6" (150mm) & 8" (200mm)

2-Cassette Sorter 6" (150mm) & 8" (200mm)
TBP

2-Cassette Sorter 6" (150mm) & 8" (200mm)

Choose your size:

6" (150mm) & 8" (200mm) 2-Cassette Sorter

Model: CTS2015

The CTS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.

Models available for:

 

  • 4" (100mm)
  • 5" (125mm)
  • 6" (150mm)
  • 8" (200mm)


Specifications:

 

 

  • For 6" (150mm) & 8" (200mm) Wafers
  • Wafer Thickness: 220µ - 700µ
  • 2 Cassette Sorter
  • Automatic System
  • ESD-Safe
  • Vacuum Required
  • 25 Slot Cassettes
  • Throughput up to 700 wph
  • Footprint: 1000 mm x 900 mm x 450 mm (L x H x W)


Optional Features:

 

 

  • RFID Cassette Identification
  • Wafer Backside ID Reading
  • Vacuum Free Edge Gripping
  • Thin Wafer Capability
  • Wafer Flipping
  • Wafer Alignment
  • Barcode / OCR Reading
  • 13/15 Slot Cassette Capability
  • Full SECS/GEM Compliance


*** Note: Please specify cassette model numbers when ordering ***