2-Cassette Sorter 6" (150mm)

<strong>6" (150mm) 2-Cassette Sorter</strong>







Model: CTS1500







The CTS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.







<strong>Models available for:</strong>



 



<ul>

<li>4" (100mm)</li>

<li>5" (125mm)</li>

<li>6" (150mm)</li>

<li>8" (200mm)</li>

</ul>







<strong>Specifications:</strong>



 



 



<ul>

<li>For 6" (150mm) Wafers</li>

<li>Wafer Thickness: 220µ - 700µ</li>

<li>2 Cassette Sorter</li>

<li>Automatic System</li>

<li>ESD-Safe</li>

<li>Vacuum Required</li>

<li>25 Slot Cassettes</li>

<li>Throughput up to 700 wph</li>

<li>Footprint: 1000 mm x 900 mm x 450 mm (L x H x W)</li>

</ul>







<strong>Optional Features:</strong>



 



 



<ul>

<li>RFID Cassette Identification</li>

<li>Wafer Backside ID Reading</li>

<li>Vacuum Free Edge Gripping</li>

<li>Thin Wafer Capability</li>

<li>Wafer Flipping</li>

<li>13/15 Slot Cassette Capability</li>

<li>Wafer Alignment</li>

<li>Barcode / OCR Reading</li>

<li>Full SECS/GEM Compliance</li>

</ul>







<font color="#00B7EF">*** Note: Please specify cassette model numbers when ordering ***</font>