TBP
2-Cassette Sorter 6" (150mm) / Aligner - with OCR
TBP
2-Cassette Sorter 6" (150mm) / Aligner - with OCR
Choose your size:
6" (150mm) 2-Cassette Sorter / Aligner - with OCR
Model: CTS1500-OCR
The CTS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
Specifications:
Optional Features:
*** Note: Please specify cassette model numbers when ordering ***
Model: CTS1500-OCR
The CTS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
- 4" (100mm)
- 5" (125mm)
- 6" (150mm)
- 8" (200mm)
Specifications:
- For 6" (150mm) Wafers
- Wafer Thickness: 220µ - 700µ
- 2 Cassette Sorter
- Automatic System
- Optical Wafer Alignment
- Insight 1700 Barcode / OCR Reading
- ESD-Safe
- Vacuum Required
- 25 Slot Cassettes
- Throughput up to 700 wph
- Footprint: 1000 mm x 900 mm x 450 mm (L x H x W)
Optional Features:
- RFID Cassette Identification
- Wafer Backside ID Reading
- Vacuum Free Edge Gripping
- Thin Wafer Capability
- Wafer Flipping
- 13/15 Slot Cassette Capability
- Full SECS/GEM Compliance
*** Note: Please specify cassette model numbers when ordering ***
Brand
TBP
Product Number
CTS1500-OCR
Size of
Wafer Size
6" (150mm)
System
Horizontal Handling
Slots
With OCR
Status
Request information
Links
For more information go to: