TEM-400 Series Gas Filters

TEM-400 Series Gas Filters

Number: TEM-400
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Specifications

Number
TEM-400
Material
Poly Pro / PTFE
Flow Rate
0-2100 L/min

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Product description

TEM-400 Series Gas Filters

TEM-400 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 75 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is small.

This PTFE membrane cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.

Specifications:
  • Material: Poly Pro / PTFE
  • Flow Rate: 0-2100 L/min
  • 99.9999999% Efficient @ 0.003 Microns
  • 2.0 sq. ft of PTFE Membrane
  • 316L, 10 RA Electro-polished Stainless Steel Housing
  • 250 psig Operation Pressure rated at 250°F
  • Helium Leak Tested to 1 X 10 -9 cc/sec
  • Compatible with all Semiconductor Grade Gases
  • Available with NPT, Compression, Face Seal, and Butt Weld Tube