PF3 015 series filter cartridges are ideal for organic solvents (benzene, dimethylbenzene), corrosive fluids and wet process chemicals, with extremely low extractable.
This Photoresist filter has been designed specifically to filter point-of-use photoresist.
1) G-line, I-line photoresists
2) Polyimide coatings
- Filter media: Hydrophobic PTFE/UPE / Hydrophilic PTFE/UPE
- Support: HDPE
- Endcaps/Cage/Core: HDPE
- Max. working temp.: 70℃
- Max. Operating DP: Forward 0.42Mpa, Reverse 0.21Mpa