MegPie Transducer (75/100mm) Dual Zone  - Stainless Steel

MegPie Transducer (75/100mm) Dual Zone  - Stainless Steel

Number: 910-03198-00
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Product description

The Dual Zone MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical
processing of multiple substrate sizes in one chamber. It applies a uniform dose of acoustic energy to a
rotating substrate. The MegPie will improve your process efficiency and lower the process time. It is easy
to retrofit to your single substrate processing tool.

Material: Stainless Steel
Processes two sizes of substrates: 150 / 200 mm, 200 / 300 mm, or 300 / 450 mm

Features & benefits
  • Patented crystal bond to the resonator
  • Patented RF connection to the crystal
  • Redundant internal RTP temperature monitoring
  • Custom sizes available
  • Uniform direct acoustic energy applied to the process
  • Increased process efficiency
  • Reduced process time
  • Reduced process chemistry usage
  • No moving parts to maintain
  • No consumables – works better than brushes 3

Technical specifications
  • Power density: 0.05 – 2.0 Watts/cm2
  • Standard operating frequency: 925 kHz; other frequencies available on request
  • Mounting height: 0.02" – 0.14" (0.5mm – 3.5mm)
  • Process fluid temperature: 15°C – 60°C
  • Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm
  • Operating RPM: 1 – 100
  • Nitrogen or CDA purge: 10 lpm
  • Mounting with 3 x M6 female threaded bosses
  • Use with IMPulse RF electronics

Processes Supported
  • Post-CMP
  • TSV
  • Pre-SOIC bond clean
  • SU-8 develop
  • Lift off
  • Resist strip
  • Processes Supported
  • LIGA processes
  • Mask cleaning
  • Etch assist
  • Plating pre-cleaning
  • Pre-plating bubble removal
Post-laser cleaning