MegPie Transducer (300mm) - Sapphire

MegPie Transducer (300mm) - Sapphire

Number: 910-02329-04
Price on quote
Quantity

Documentation

No downloads available.

Reviews

Product description

The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time. It is easy to retrofit to your single-substrate processing tool.

Available in 100 mm to 450 mm+ and custom sizes

Features & benefits
  • Particle-neutral sapphire resonator – no particles added to the process
  • Patented crystal bond to the resonator
  • Patented RF connection to the crystal
  • Redundant internal RTD temperature monitoring
  • Sapphire resonator compatible with all processing chemistries
  • Uniform direct acoustic energy applied to the process
  • Increased process efficiency
  • Reduced process time
  • Reduced process chemistry usage
  • No moving parts to maintain
  • No consumables – works better than brushes

Technical specifications
  • Power density: 0.05 – 2.0 Watts/cm2
  • Standard operating frequency: 925 kHz; other frequencies available on request
  • Mounting height: 0.02" – 0.14" ( 0.5 mm – 3.5 mm)
  • Process fluid temperature: 15°C – 60°C
  • Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm
  • Operating RPM: 1 - 100
  • Nitrogen or CDA purge: 10 lpm
  • Mounting with 3 x M6 female threaded bosses
  • Use with IMPulse RF electronics

Processes supported
  • Post-CMP cleaning
  • TSV
  • Pre-SOIC bond cleaning
  • SU-8 develop
  • Lift off
  • Resist strip
  • LIGA processes
  • Mask cleaning
  • Etch assist
  • Plating pre-cleaning
  • Pre-plating bubble removal
  • Post-laser cleaning