4" Mask Aligner and Exposure System - 350W UV Lamp

max 25 mw/cm2- Max. Beam Size 6.25" x 6.25"- Beam Uniformity =650mmHg, (Vacuum pump included)- Exhaust Lamp House Cooling- Flexible Duct Al hose inside diameter 100mm- Flow rate 10 Liter/min- Weight 800Kg" />

4" Mask Aligner and Exposure System - 350W UV Lamp

Number: MDA-40FA
Price on quote
Quantity

Specifications

Number
MDA-40FA
Substrate size
4" (100mm)
System type
Fully Automatic
Light source
350W UV Lamp
Brand

Documentation

Mask Aligners Brochure 2017

Reviews

Product description

4" Mask Aligner and Exposure System - 350W UV Lamp

Model: MDA-40FA

The MDA-40FA is a brand new model and represents next generation of Full-Field lithography systems. The brand new Full Auto Aligner platform offers a higher Overlay Accuracy and more reliable operation. It is great for LED. This Machine has a higher productivity and is includes user friendly controls.

Specifications:
  • Type: Full automatic (Mask Aligner)
  • Mask size up to 7" x 7"
  • Substrate size: up to 6"
  • UV lamp & Power: 350W & power supply
  • Uniform beam size: 6.25" x 6.25"
  • Beam Uniformity: <±3%
  • Beam wavelength: 350 ~ 450nm
  • 365nm Intensity: ~25mW/cm2
  • Alignment accuracy: 1um
  • Process resolution: 1um@1um PR thickness with vacuum contact
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Substrate chuck moving: x,y,z & ? (Motorized)
  • Pre-aligner: ±50um