Model: MDA-40FA
The MDA-40FA is a brand new model and represents next generation of Full-Field lithography systems. The brand new Full Auto Aligner platform offers a higher Overlay Accuracy and more reliable operation. It is great for LED. This Machine has a higher productivity and is includes user friendly controls.
Specifications:
- Type: Full automatic (Mask Aligner)
- Mask size up to 7" x 7"
- Substrate size: up to 6"
- UV lamp & Power: 350W & power supply
- Uniform beam size: 6.25" x 6.25"
- Beam Uniformity: <±3%
- Beam wavelength: 350 ~ 450nm
- 365nm Intensity: ~25mW/cm2
- Alignment accuracy: 1um
- Process resolution: 1um@1um PR thickness with vacuum contact
- Process mode: Soft, Hard, Vacuum contact & Proximity
- Substrate chuck moving: x,y,z & ? (Motorized)
- Pre-aligner: ±50um
