4" (100mm) Stainless Steel Cassette - 25 Slot, Shielded Sides

4" (100mm) Stainless Steel Cassette - 25 Slot, Shielded Sides

Number: SSC100-25-SSNSS
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Specifications

Number
SSC100-25-SSNSS
TAG 1
4" (100mm)
TAG 2
Electro-Polished 316SST
TAG 3
25 Slots

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Product description

4" (100mm) Stainless Steel Cassette - 25 Slot, Shielded Sides

SSC Series Stainless Steel Cassette for high temperature wafer bake applications or specialty applications, including megasonic and cleaning processes. All welded 316SST electro?polished construction. Outside dimensions are similar to SEMI standard plastic process carriers.

Transfer and automation compatible. Light Weight: Standard SST 200mm cassette ~2.5lbs. Temperature: maximum recommended continuous operating temperature without causing distortion is 550º Celsius. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial chemicals and solvents including: sodium and calcium brines, hypo chlorite solutions, phosphoric acid, sulfite liquors, and sulfurous acids.

Standard cassettes are designed for 50mm, 75mm, 100mm, 125mm, 150mm, 200mm, and 300mm wafer configurations. Standard cassettes are designed for 75mm, 100mm, 125mm, 150mm and 200mm, 25?slot wafer configurations. Non standard 10?slot, 12?slot, 13?slot, 26?slot and 28?slot cassettes, as well as carriers for square substrates and other non?standard diameters and wafer thicknesses are available upon request.

Specifications:
  • For 4" (100mm) wafers
  • Material: Elector-polished 316SST
  • Max temp.: 550 °C
  • Shielded sides
  • 25 slots

All welded 316 stainless steel construction
SEMI standard outer dimensions