4" (100mm) Metal Cassette (Open End Wall)

4" (100mm) Metal Cassette (Open End Wall)

Number: 2851-4EN
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Specifications

Number
2851-4EN
TAG 1
4" (100mm)
TAG 2
Electroless Nickel Plated
TAG 3
25 Slots

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Product description

4" (100mm) Metal Cassette (Open End Wall)

Version: 2851-4EN

Material: Electroless Nickel Plated
Maximum Temperature: 288°C

Dimensions:
  • Height: 4.52"
  • Width: 4.25"
  • Length: 5.64"

2851 Series Cassettes are conventional 25 slot metal cassettes used in semiconductor manufacturing operations. They are typically used in areas where wafer positioning is important or where elevated temperatures cause warpage to other carriers. 2851 Series Cassettes are direct replacements for many OEM metal carriers used with wafer track/elevator systems, photo resist bake systems, and robotic loading systems for CVD and etch processes. This series has been incorporated as the original equipment carrier provided by similar OEM’s.

The 2851 Series is manufactured from aluminum alloy for precision and high strength. Slots feature an 8° angle to reduce front and backside wafer contact. Stainless steel spacer bars and fasteners are used to precisely secure the side plates to each other. Two solid PFA rods are used to support the wafers in the slots. Aluminum 2851 Series Cassettes are compatible with the CH handle.

Benefits:
  • High Temperature
  • High Performance
  • SEMI Standard
  • Safe