Automatic door opener provides clean and easy acces to wafers in a SEMI standard 300mm FOUP. Interlocked loadport turntable stage allows for 360° FOUP rotation to give operators access to the open FOUP. When open, the FOUP door is kept clean. Simple design for reliability and low maintenance. Unique low profile design ideal for tabletop applications and FOUP wash stations. Small footprint saves valuable cleanroom space.
Available with:
- EU Plug
- UK Plug
Dimensions:
- Height: 20" (506mm)
- Depth: 35" (889mm)
- Width: 16" (406mm)
Voltage:
- 230VAC