Semiconductor equipment

Prevent wafer scrapping?

Can you detect tool deterioration on time?

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Diagnostic for tool integration    Monitor trends of vibration conditions    Detect dynamic problems

VS-Series Vibration Sensors Provide advanced warning when machine conditions are deteriorating, allowing engineers to take preventive action and avoid failure and losses.

Our vibration sensor features
Fingertip-size sensor head allows for easy fitting:
  • Measuring 3 axis (X, Y, Z)
  • High output data >800 measurements/sec
  • Simple and convenient USB plug-n-use operation
  • Seamless integration via SECS / GEM
  • Tool integration or mobile use, on/off-line monitoring
If healthcare could be just as simple: Realtime monitoring of machine health condition with the VS-2SI Online vibration monitoring!

CMP Tool
Pad conditioner (PC) arm vibration behaviour

The VS-1TM was used to detect the vibration of the Pad Conditioner arm. The yellow arrow Y indicates the sweeping movement of the PC Arm.

Readings show Z-axis vibration to be high at the centre of the pad. Follow-up investigation found that the High Pressure Rinse DIW nozzle spray was weak at the pad centre area. This will lead to low cleaning efficiency at pad centre area and induce pad glazing and microscratch issu


SEM images of pore-type pad surface and glazed surface of the same pad.
Data logged by VS-1 @ 800Hz


Robot handling - Data logged by VS-1

Robot handling
FI robot wafer retrieval motion

1.  FI robot moving to ready position (pick up slot position) (Z-axis motion)
2.  Robot blade extends into FOUP (X-axis motion. Plunger will retract during start of this step)
3.  Robot blade picks up the wafer (Z-axis motion, wafer lifted  up from the slot and plunger extends to hold the wafer)
4.  Robot blade retracts from FOUP (X-axis motion, wafer retrieval action completed)