Prevent wafer scrapping?
Can you detect tool deterioration on time?
✔ Diagnostic for tool integration ✔ Monitor trends of vibration conditions ✔ Detect dynamic problems
VS-Series Vibration Sensors Provide advanced warning when machine conditions are deteriorating, allowing engineers to take preventive action and avoid failure and losses.
- Measuring 3 axis (X, Y, Z)
- High output data >800 measurements/sec
- Simple and convenient USB plug-n-use operation
- Seamless integration via SECS / GEM
- Tool integration or mobile use, on/off-line monitoring