Does the vibration sensor need maintenance or do you need to calibrate the sensor?
Our vibration sensors use MEMs components, there is no need for calibration or maintenance.
What is the Warranty of the vibration sensors?
We offer a 12 month warranty.
Can the vibration sensors be used in a wet environment?
They can be used in a high moisture environment. To enable them for wet chemical environment however, additional protective casing (which will be made based on specific environment) will have to be ordered.
What is the installed base for these vibration sensors? How many sensors have been installed?
VS1-R: 88 sets in AMAT CMP Reflexion and Reflexion LK system, Pad-conditioner arm vibration monitoring
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