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SPS Group BV.POLOS NanoWriter Series
The POLOS NanoWriter is a versatile UV Direct
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Laser Writer with ultra high precision components,
specifically designed to give the user the
highest degree of freedom to create
microstructures in photosensitive layers.Handling & Shipping
Product for safe substrate handling,
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transfer or sorting of wafers. Solutions
for shipping and storage of substrates.Wet Process
Process equipment for heated DI water and
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chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.Thin Films
Systems for thin films, ranging from CVD and ALD
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atomic layer deposition to gas filters and heating
elements for diffusion ovens.Photolithography
Products for safe storage and
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handling of reticles, as well as mask
aligners and uv meters.