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SPS Group BV.The POLOS NanoWriter is a versatile UV Direct
Laser Writer with ultra high precision components,
specifically designed to give the user the
highest degree of freedom to create
microstructures in photosensitive layers.
Product for safe substrate handling,
transfer or sorting of wafers. Solutions
for shipping and storage of substrates.
Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.
Systems for thin films, ranging from CVD and ALD
atomic layer deposition to gas filters and heating
elements for diffusion ovens.
Products for safe storage and
handling of reticles, as well as mask
aligners and uv meters.
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SPS Group BV.